High Production with Exacting Temperature and Atmosphere Control

TPS manufactures the fastest and most efficient production furnaces available for thick film processing. High production yields and through put are achievable due to the design's quick start-up and changeover time, precise and repeatable temperature profiles up to 1000C. The process gas atmosphere is uniform and ultra-clean.  Click to view pdf with latest pictures (later).

The TF-Series infrared furnaces achieve exacting temperature profiles with rapid heat rise and no overshoot. The rapid heat rise of these furnaces is of particular advantage in the final lid sealing or die attach process since the semiconductor is not exposed to prolonged high temperature. The systems require only minutes to come up to temperature and stabilize.

Motorized Chamber Lift. TF-Series furnaces include TPS's unique motorized chamber lift. This feature allows users to open the furance chamber, separating the chamber top and bottom for inspection, cleaning and maintenance of chamber internals.

See a video of this in action here: http://lcifurnaces.com/Support/videos-tps.php

Computer Controlled. The furnace is operated via the lasted TPS Furnace control software installed on a robust managed platform industrial furnace computer.  The process engineer can easily vary process parameters using the sophisticated PID and power control parameters in the software. An almost infinite number of recipes and profiles can be labeled and stored for ready access on the furnace computer.  The software includes multiple levels of password protected control and logs each change in recipe load or furnace state useful for troubleshooting product and process performance.

The furnace software operates on a Microsoft Windows 7 Professional computer system.  The program and all settings and recipes are stored on the local hard drives.  The computer is complete with 19" LCD 1280x1024 high resolution color graphic screen, full size keyboard/mouse interface and Ethernet high-speed network connections to facilitate view and control of the furnace by managers and process engineers from any location. The furnace includes two (2) local USB ports for connecting profilers and jump drive storage devices.

Low cost of ownership results from the furnace versatility, high throughput, quick readiness, and low utility consumption. Small zones and high temperature differentials enable broad profile flexibility. Profiles with peak temperatures from 150C to 1000C are possible. The furnace can be turned on, turned off, or re-profiled in minutes, saving time and money.

Made in USA. TPS TF-serices furnaces are fabricated and assembled in Paramount, California, USA. Many typical details can be viewed at our picture gallery: TPS Gallery.

IR Furnace Cross-Section

Furnace Cross-section

Furnace Specifications for Typical TF-Series Models

Parameter TF-600 TF-900 TF-1200 TF-1500 TF-2400
Process Gas CDA, Nitrogen (-N), Forming Gas (-FG) and Nitrogen/Hydrogen mixing (-HO/HNM) models available.
Control Zones 4-6 zones  6-9 zones  8 zones 10 zones 12 zones
Heating Chamber length 152 cm (60 inches) 229 cm (90 inches) 304 cm (120 inches) 380 cm (150 inches) 609 cm (240 inches)
Cooling Chamber 152-304 cm (60-120 inches), consisting of a mix of these modules, depending on application:
    1. CACT – CDA or N2 convective and radiant cooling, exterior fan heat removal.
    2. CAWC – CDA or N2 convective and radiant cooling, cold water heat removal (city or chiller).    
Conveyor Belt BNV- low mass, balanced weave stabilized Nichrome-V
Model by Belt Width
23 cm (9 in)
25 cm (10 in)
38 cm (15 in)
46 cm (18 in)
61 cm (24 in)

TF-609, TF-609X
TF-610, TF-610X
TF-615, TF-615X

TF-909, TF-909X
TF-910, TF-910X
TF-915, TF-915X
TF-918, TF-918X



Exhaust Improved venturi exhaust stacks to reduce process gas consumption.  Number of stacks vary with process requirements.
Temperature Capacity, max 1000C
Electrical All models include universal transformers which accommodate 220-480 Vac 3-ph and 50/60 Hz frequency anywhere in the world, allowing furnace relocation without external equipment. All furnace systems are phase balanced to improve facility efficiency. IR lamp controls automatically keep IR spectrum constant.

Furnace Standard Features and Options

Standard features are listed on the Standard Features pages (see link below). Popular options include the following:

Code Description Code Description Code Description
EM Element Monitors OA Oxygen Analyzer MCL Motorized Chamber Lift
OT Overtemperature Monitor SMEMA Product Handling HSK Upstream/Downstream Handshake
LT Process Ready Light Tower UCD Ultrasonic Cleaner Dryer EH Edge Heaters

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